The opinion in support of the decision being entered today was not written for publication and is not precedent of the Board. Paper No. 16 UNITED STATES PATENT AND TRADEMARK OFFICE ____________ BEFORE THE BOARD OF PATENT APPEALS AND INTERFERENCES ____________ Ex parte TUE NGUYEN ____________ Appeal No. 2002-0177 Application No. 09/325,835 ____________ ON BRIEF ____________ Before GARRIS, OWENS, and PAWLIKOWSKI, Administrative Patent Judges. PAWLIKOWSKI, Administrative Patent Judge. DECISION ON APPEAL This is a decision on an appeal from the final rejection of claims 1-14 and 17. Claims 15, 16 have been cancelled. Claims 18-20 have been with drawn from consideration. The subject matter on appeal is represented by claims 1, 11, 12, 14 and 17, each of which are set forth below: 1. A showerhead plate of a showerhead like precursor delivery apparatus, comprising:Page: 1 2 3 4 5 6 7 8 9 NextLast modified: November 3, 2007