Ex Parte NGUYEN - Page 1



                   The opinion in support of the decision being entered today was     
                   not written for publication and is not precedent of the Board.     
                                                                                     
                                                            Paper No. 16              
                      UNITED STATES PATENT AND TRADEMARK OFFICE                       
                                    ____________                                      
                         BEFORE THE BOARD OF PATENT APPEALS                           
                                  AND INTERFERENCES                                   
                                    ____________                                      

                                   Ex parte TUE NGUYEN                                
                                    ____________                                      
                                Appeal No. 2002-0177                                  
                              Application No. 09/325,835                              
                                    ____________                                      
                                      ON BRIEF                                        
                                    ____________                                      

          Before GARRIS, OWENS, and PAWLIKOWSKI, Administrative Patent                
          Judges.                                                                     
          PAWLIKOWSKI, Administrative Patent Judge.                                   

                                  DECISION ON APPEAL                                  
               This is a decision on an appeal from the final rejection of            
          claims 1-14 and 17.  Claims 15, 16 have been cancelled. Claims              
          18-20 have been with drawn from consideration.                              
               The subject matter on appeal is represented by claims 1,               
          11, 12, 14 and 17, each of which are set forth below:                       
                    1.  A showerhead plate of a showerhead like precursor             
               delivery apparatus, comprising:                                        








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