Ex Parte NGUYEN - Page 4

          Appeal No. 2002-0177                                                        
          Application No. 09/325,835                                                  

          I. 35 U.S.C. § 103 rejection of claims 1-10 and 13                          
               As pointed out by the examiner on pages 4-5 of the answer,             
          Figure 2 of appellants’ specification (admitted prior art) shows            
          a showerhead comprising a delivery hole 6, a showerhead heater              
          3, and a baffle 8.                                                          
               We further note that Figure 2 (admitted prior art)                     
          indicates that the delivery hole 6 has, on one side, a large                
          diameter bore, and, on the other side, a smaller diameter bore.             
          Hence, contrary to appellant’s assertions made throughout the               
          brief, the admitted prior art teaches a plurality of delivery               
          apertures placed in specified geometric pattern about the                   
          showerhead plate, where each delivery aperture is comprised of a            
          large diameter bore and a smaller diameter bore.                            
               We note that the examiner relies on Vukelic regarding the              
          thickness of the showerhead plate.  However, the thickness is               
          not a requirement of claim 1 and we need only consider claim 1              
          because, as admitted by appellant, this grouping of claims under            
          this rejection stand or fall together.  37 CFR § 1.192 (c)(7)(8)            
          (2000).  Because Vukelic is relied upon for the thickness of the            
          showerhead, we do not discuss this reference in sections II-IV              
          of the decision.                                                            
               In view of the above, we affirm this rejection.                        

          II. The 35 U.S.C. § 103 rejection of claim 11                               
               On page 9 of the brief, appellant argues that Murakami does            
          not have an embedded heater, but rather, uses an external heater            
          63 as shown in Figure 9.                                                    
               Upon our review of Murakami in this regard, we find that,              
          as shown in Figure 9, the heat medium is supplied through heat              
          medium pipe 62.  The heat medium pipe is combined with a heater             
          63 for heating the heat medium.  An extractor 64, such as a                 
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