Appeal No. 2002-0177
Application No. 09/325,835
a plurality of delivery apertures placed in specified
geometric pattern about the showerhead plate, where each
delivery aperture is comprised of a large diameter bore to
provide improved flow conduction across the showerhead
plate and a smaller diameter bore that communicates with
the large diameter bore to provide proper mixing of the
precursor and a consistent pressure level across the entire
showerhead plate to provide a uniform delivery of precursor
to each delivery aperture; and
a heater means that maintains the showerhead plate at
a specified constant temperature, where the heater means
supply sufficient thermal energy to the showerhead plate to
maintain the specified temperature and compensate for the
dissipation of heat caused by the precursor as it moves
through the plate.
11. The precursor delivery system in accordance with
claim 1, wherein heating means is embedded in the
showerhead plate.
12. The precursor delivery system in accordance with
claim 1, wherein the delivery plurality of aperture of the
showerhead plate form a [sic] array of concentric circles.
14. A showerhead system with improved flow conduction
and thermal conductance for a precursor delivery apparatus
comprising:
a plurality of precursor inlet ports;
a first showerhead plate having improved flow
conduction and thermal conductance;
a baffle plate below the precursor inlet ports to
diffuse the precursor dispensed from the inlet and
a second showerhead plate with improved flow
conduction and thermal conductance at the precursor inlet
ports to diffuse the precursor dispensed from the inlet.
17. The showerhead system in accordance with claim
14, wherein an area containing the delivery apertures of
the second showerhead plate is smaller than the area
containing the delivery aperture of the first showerhead
plate;
the delivery holes of the second high flow conductance
and high thermal conductance showerhead plate are tilted
outward for delivering the precursor uniformly at a greater
area.
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Last modified: November 3, 2007