Appeal No. 2002-1025 Page 8 Application No. 09/454,354 reference does teach that the temperature must be sufficient to soften the waste matter accumulations on the abrasive disk. In this regard, Brunelli states that the planarizing surface be heated to 90°F. to 115°F. “and other temperature ranges are used in other embodiments, depending upon the composition of the waste matter accumulations 264 and the/or the polishing pad 240" (column 9, lines 23-29). Owing to the recognition by Brunelli that the temperature to which the pad is heated is dependent upon several specified factors, we consider it to be a result-effective variable, that is, a variable which achieves a recognized result, the achievement of which is determinable by routine experimentation. See, for example, In re Antonie, 559 F.2d 618, 620, 195 USPQ 6, 8 (CCPA 1977) and In re Boesch, 617 F.2d 272, 276, 205 USPQ 215, 219 (CCPA 1980). Thus, we agree with the examiner (Paper No. 6, page 3), that the selection of a temperature would have been obvious to one of ordinary skill in the art in view of these recognized factors. Claims 20 and 25, like claim 17, are not limited to conditioning of any kind, much less to preconditioning fixed abrasive articles. Claim 20 recites an apparatus for chemical-mechanical polishing a wafer comprising a fixed abrasive element and means for heating the fixed abrasive element to at least 90 degrees Centigrade. Claim 25 expresses the temperature requirement in terms of a heater for heating the fixed abrasive element to about 90 degrees Centigrade. Brunelli clearly discloses the fixed abrasive element and means for heating it. As for the claimed temperature range, thePage: Previous 1 2 3 4 5 6 7 8 9 10 11 12 13 NextLast modified: November 3, 2007