The opinion in support of the decision being entered
today was not written for publication in a law journal
and is not binding precedent of the Board.
Paper No. 17
UNITED STATES PATENT AND TRADEMARK OFFICE
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
Ex parte DAVID P. MERRITT, WAYNE M. MOREAU
and ROBERT L. WOOD
Appeal No. 2002-1144
Application No. 09/422,633
ON BRIEF
Before KIMLIN, GARRIS and POTEATE, Administrative Patent Judges.
KIMLIN, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal from the final rejection of claims 1-11
and 23, all the claims remaining in the present application.
Claim 1 is illustrative:
1. An improved positive working resist composition comprising a
polymer having functional groups pendant thereto which contribute
to the solubility of the polymer in alkaline developers and a
portion of which functional groups are substituted with acid
labile groups which inhibit the alkaline solubility of the
-1-
Page: 1 2 3 4 5 6 7 8 9 10 Next
Last modified: November 3, 2007