Appeal No. 1999-0865
Application No. 08/468,573
shaped antenna coil 2 of a plasma reactor 1, with the antenna
ends 5 and 6 capacitively coupled to ground through variable
capacitance 15 connected to the symmetrical point of the coil.
It is our opinion that the skilled artisan would recognize the
obviousness of, instead of utilizing a single capacitance element
as explicitly described in Müller, utilizing multiple capacitance
elements of smaller capacity connected in parallel to achieve the
identical desired capacitance value.
We further note that, with respect to claim 59, Müller also
provides for the coupling of the RF energy generator to a first
terminal of the antenna coil antenna through connection point
13 as required by the recitation in claim 57, the base claim for
claim 59.
In summary, we have reversed the Examiner’s 35 U.S.C.
§ 102(b) rejection of claim 59, as well as the Examiner’s
35 U.S.C. § 103(a) rejection of claims 61-68, but have sustained
the Examiner’s 35 U.S.C. § 102(b) rejection of claims 57, 58, and
60. We have entered a new ground of rejection against claims
59 and 61-68 under 37 CFR § 1.196(b).
13
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