Ex Parte JANG et al - Page 1




                                    The opinion in support of the decision being entered today was not written                           
                                            for publication and is not binding precedent of the Board.                                   

                                                                                                              Paper No. 34               

                                     UNITED STATES PATENT AND TRADEMARK OFFICE                                                           
                                                              ____________                                                               
                                           BEFORE THE BOARD OF PATENT APPEALS                                                            
                                                        AND INTERFERENCES                                                                
                                                              ____________                                                               
                                                     Ex parte SYUN-MING JANG                                                             
                                                          and CHEN-HUA YU                                                                
                                                              ____________                                                               
                                                         Appeal No. 2001-0430                                                            
                                                       Application No. 08/697,699                                                        
                                                              ____________                                                               
                                                                ON BRIEF                                                                 
                                                              ____________                                                               
                Before HAIRSTON, DIXON, and BLANKENSHIP, Administrative Patent Judges.                                                   
                HAIRSTON, Administrative Patent Judge.                                                                                   



                                                        DECISION ON APPEAL                                                               


                        This is an appeal from the final rejection of claims 1, 2, 4 through 6, 8 through 10 and 24.                     
                        The disclosed invention relates to a method of forming a gap filling sandwich composite                          
                dielectric layer construction for use within an integrated circuit.  A gap filling dielectric layer is                   
                sandwiched between a first and a second conformal dielectric layer.  The first conformal dielectric                      
                layer is formed through a first plasma enhanced chemical vapor deposition (PECVD) of a first                             






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