The opinion in support of the decision being entered today was not
written for publication and is not binding precedent of the Board.
Paper No. 26
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte GURTEJ S. SANDHU and RANDHIR PS THAKUR
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Appeal No. 2001-1697
Application No. 09/059,718
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ON BRIEF
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Before WALTZ, LIEBERMAN and KRATZ, Administrative Patent Judges.
KRATZ, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal from the examiner's refusal to
allow claims 41, 43, 44, 48, 50 and 51, which are all of the
claims pending in this application.
BACKGROUND
Appellants' invention relates to a process of forming a
dielectric film containing silicon dioxide and silicon nitride on
an exposed surface of a silicon-containing layer. The exposed
surface is heated and contacted with a gaseous mixture including
ozone, nitrous oxide, a compound containing a halogen, and steam.
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