The opinion in support of the decision being entered today was not written for
publication and is not binding precedent of the Board.
Paper No. 20
UNITED STATES PATENT AND TRADEMARK OFFICE
_____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
_____________
Ex parte DANIEL VINCENT ROWLAND
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Appeal No. 2001-2085
Application No. 09/104,409
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ON BRIEF
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Before KRASS, BARRY and BLANKENSHIP, Administrative Patent Judges.
KRASS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal from the final rejection of claims 13, 16 and 17.
Claims 14 and 15 have been indicated by the examiner as being directed to allowable
subject matter and form no part of this appeal.
The invention is directed to a method for monitoring a temperature in a rapid
thermal processing (RTP) step. In particular, the silicidation reaction of a cobalt film on
silicon is utilized by measuring the cobalt film prior to thermal processing and the
resultant cobalt silicide sheet resistance after thermal processing to determine
accurately the reaction temperature at the cobalt/silicon interface.
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