The opinion in support of the decision being entered today was not written for publication and is not binding precedent of the Board. Paper No. 22 UNITED STATES PATENT AND TRADEMARK OFFICE __________ BEFORE THE BOARD OF PATENT APPEALS AND INTERFERENCES __________ Ex parte SCOTT J. BRABEC, KENNETH R. BRENNEN, WILLIAM J. SCHNINDELDECKER STANTEN C. SPEAR, ROGER E. RUGLAND and BRUCE C. JOHNSON __________ Appeal No. 2002-0897 Application 09/303,020 ___________ ON BRIEF ___________ Before OWENS, WALTZ, and LIEBERMAN, Administrative Patent Judges. OWENS, Administrative Patent Judge. DECISION ON APPEAL This appeal is from the final rejection of claims 1-20, which are all of the claims remaining in the application. THE INVENTION The appellants claim a method for forming a structure having a cavity within a semiconductor wafer. Claim 1 is illustrative: 1. A method of forming a structure in and on a semiconductor wafer, comprising the steps of: 1Page: 1 2 3 4 5 6 7 8 9 10 11 12 NextLast modified: November 3, 2007