Appeal No. 2003-0508 Page 2
Application No. 09/449,023
BACKGROUND
Appellants' invention relates to an apparatus for damping
vibrations between a video optical microscope and a test head for
an integrated circuit, test apparatus including means for
reducing relative movement between an integrated circuit test
head and a video optical microscope, and a method for micro
probing a semiconductor device that includes a step of viewing
the semiconductor using a video microscope and provides for
vibration damping between the microscope and an integrated
circuit tester. An understanding of the invention can be derived
from a reading of exemplary claims 1, 12 and 14, which are
reproduced below.
1. Test apparatus comprising:
a) an integrated circuit test head,
b) a video optical microscope comprising an objective
lens, and a video imager,
c) a microscope movement apparatus for positioning the
video optical microscope over the integrated circuit test
head,
d) a mounting means for holding the video optical
microscope and microscope movement apparatus, and
e) computer controlled clamping means attached between
the video optical microscope and the integrated circuit test
head, said clamping means being disabled during microscope
movement but switched into a hard rigid mode during video
image acquisition thereby firmly coupling the video optical
microscope to the integrated circuit test head and reducing
the relative motion between the video optical microscope and
the integrated circuit test head, said clamping means
comprising a plurality of piston driven rods coupled to the
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