Appeal No. 2003-0508 Page 3
Application No. 09/449,023
video optical microscope and which engage the test head when
actuated.
12. A method of microprobing a semiconductor device on
top of a integrated circuit tester, said method comprising:
a) viewing the semiconductor device through a video
microscope, said video microscope comprising an objective
lens and a video camera,
b) connecting the video microscope to a microscope
movement means which in turn are connected to a mounting
means,
c) microprobing using microprobing means which are
rigidly placed on top of the integrated circuit tester, and
d) vibration damping using a computer controlled
clamping device which couples the integrated circuit tester
to the video microscope, said clamping device being disabled
when the video microscope is to be moved, and the clamping
device being enabled when the movement is complete, allowing
the video microscope to vibrate in unison with the tester,
thereby reducing the relative motion between the microscope
and tester, said vibration damping including using at least
one piston driven rod coupled to the video microscope and
which engage the integrated circuit tester when actuated.
14. Vibration damping apparatus for damping vibrations
between an integrated circuit test head and a video optical
microscope comprising a plurality of piston driven rods
coupled to the video optical microscope with the rods
engaging the test head when the piston driven rods are
actuated, and means for computer controlling the piston
driven rods during vibration damping.
The prior art references of record relied upon by the
examiner in rejecting the appealed claims are:
Hunter 4,927,165 May 22, 1990
Gertel et al. (Gertel) 5,549,269 Aug. 27, 1996
Young et al. (Young) 5,705,814 Jan. 06, 1998
Colvin 5,764,409 Jun. 09, 1998
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