The opinion in support of the decision being entered today was
not written for publication and is not binding precedent of the
Board.
Paper No. 15
UNITED STATES PATENT AND TRADEMARK OFFICE
__________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
__________
Ex parte MICHAEL R. CONBOY, RUSSEL SHIRLEY
and ELFIDO COSS, JR.
__________
Appeal No. 2003-0614
Application 09/520,591
___________
ON BRIEF
___________
Before ABRAMS, MCQUADE, and BAHR, Administrative Patent Judges.
MCQUADE, Administrative Patent Judge.
DECISION ON APPEAL
Michael R. Conboy et al. appeal from the final rejection of
claims 1 through 26, all of the claims pending in the
application.
THE INVENTION
The invention relates to “apparatus and systems for rotating
and tracking the movement of wafers in a semiconductor processing
plant” (specification, page 2). Representative claim 1 reads as
follows:
1. An apparatus for wafers in a multiple stage wafer
processing system, the apparatus comprising:
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