Ex Parte HIROOKA et al - Page 8




                   Appeal No. 2003-0907                                                                                      
                   Application No. 09/337,278                                                                                


                   Miyashita.  It is well settled that the burden of establishing the practical significance                 
                   of data in the record with respect to unexpected results rests with the Appellants,                       
                   which burden is not carried by mere arguments of counsel.  See generally In re                            
                   Geisler, 116 F.3d 1465, 1470, 43 USPQ2d 1362, 1365-66 (Fed. Cir. 1997); In re                             
                   Merck & Co., 800 F.2d 1091, 1099, 231 USPQ 375, 381 (Fed. Cir. 1986); In re                               
                   Longi, 759 F.2d 887, 897, 225 USPQ 645, 651-52 (Fed. Cir. 1985); In re Klosak,                            
                   455 F.2d 1077, 1080, 173 USPQ 14, 16 (CCPA 1972).  Thus, Appellants have not                              
                   carried the burden of explaining the practical significance of the results with respect                   
                   to the invention of Miyashita, vis-a-vis properties to be expected with a different                       
                   compound to adjust the resistivity.  Moreover, the declaration only provides tests on                     
                   one type of wafer.  However, the claims are open to cleaning a wide variety of                            
                   devices.  Thus, we find that the evidence presented in the declaration is not                             
                   commensurate in scope with the range of compositions encompassed by the                                   
                   appealed claims.  See In re Clemens, 622 F.2d 1029, 1035-36, 206 USPQ 289,                                
                   295-96 (CCPA 1980).                                                                                       
                          The Examiner’s rejection of claims 1 and 5 under 35 U.S.C. § 103(a) as                             
                   unpatentable over the combination of Miyashita and Kanno is affirmed.  We also                            



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