Appeal No. 2003-0907
Application No. 09/337,278
was known and would have been obvious to a person of ordinary skill in the art.
(Answer, p. 19).
As stated above, a person of ordinary skill in the art would have recognized
that water having resistivity of about 5 MScm is used in removing contaminates
from semiconductor devices. (See Miyashita, Kanno and Takehiko). In the
cleaning method of Miyashita water is allowed to contact the device which is being
cleaned. (Col. 5, ll. 33-37). Appellants have not specified any unique or
unexpected results are achieved by soaking the device with the cleaning solution. A
person of ordinary skill in the art would recognize that allowing the object to soak in
the cleaning solution would not adversely affect the cleaning of the device.
Based on our consideration of the totality of the record before us, having
evaluated the prima facie case of obviousness in view of Appellants’ arguments and
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