Appeal No. 2003-1980
Application No. 09/351,868
REPRESENTATIVE CLAIMS
Claims 1, 5, 6, 17, 49, 73 and 74 are representative and read
as follow:
1. A method for simultaneously cleaning and annealing a
metallic layer plated on a workpiece having an insulating
substrate, the method comprising the step of applying a cleaning
and annealing fluid to the metallic layer while heating the
workpiece and the applied cleaning and annealing fluid.
5. A method according to claim 1, wherein the cleaning and
annealing fluid comprises deoxygenated de-ionized water.
6. A method according to claim 5 further comprising the step
of deoxygenating the deionized water by adding bubbled nitrogen to
the de-ionized water.
17. A method according to claim 1, wherein the cleaning and
annealing fluid comprises propylene glycol.
49. A method for altering the grain size and the texture of
a metallic layer formed over an insulating substrate, the method
comprising the step of heating the substrate and deoxygenated de-
ionized water while applying the deoxygenated de-ionized water to
the substrate.
73. A method for simultaneously cleaning and annealing a
metallic layer plated on a workpiece having an insulating
substrate, the method comprising the step of applying a heated
cleaning and annealing fluid to the metallic layer to both clean
and anneal the metallic layer.
74. A method according to claim 73, wherein the cleaning and
annealing fluid comprises deoxygenated de-ionized water.
2
Page: Previous 1 2 3 4 5 6 7 8 9 10 11 12 Next
Last modified: November 3, 2007