Appeal No. 2002-1029
Application 08/869,328
through 40. Claims 2, 3, 5, 8, 16, and 26 through 35 are
cancelled. These are all the claims in the application.
The claimed invention is directed to a chemical-
mechanical planarization of semiconductor wafers. The claimed
process is related to a method of terminating such a planariza-
tion. The present invention involves monitoring acoustic
emission energy with a frequency of over 50,000 Hertz for a
planarization termination signal.
The claimed invention may be further understood with
reference to the appealed claims attached as an appendix to
appellant’s Supplemental Appeal Brief, Paper No. 28.
The references of record relied upon by the examiner
as evidence of obviousness are:
Yu 5,222,329 June 29, 1993
Salugsugan 5,245,794 Sept. 21, 1993
REJECTION
Claims 1, 4, 6, 7, 9 through 15, 17 through 25, and 36
through 40 stand rejected under 35 U.S.C. § 103 as unpatentable
over Yu in view of Salugsugan. According to the examiner, it
would have been obvious to have modified the Yu apparatus and
2
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