Appeal No. 2002-1029
Application 08/869,328
method with a filter as taught by Salugsugan to halt the polisher
operation. The examiner considers the specific frequency range
of the claimed subject matter to be a result effective variable.
OPINION
We have carefully reviewed the rejection on appeal in
light of the arguments of the appellants and the examiner. As a
result of this review, we have reached the determination that the
applied prior art does not establish the prima facie obviousness
of the claims on appeal. Our reasons follow.
The following represents our findings of fact with
respect to the scope and content of the prior art and the
differences between the prior art and the claimed subject matter.
Yu discloses a method for controlling a chemical-mechanical
polishing operation on a workpiece comprising the steps of
polishing the workpiece with a slurry of abrasives. The
polishing operation generates acoustic energy emissions which
are detected. The sound intensity versus the frequency of the
acoustic emission is measured. Col. 6, lines 3-5. When a
significant change in the sound frequency and amplitude is
3
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