THIS OPINION WAS NOT WRITTEN FOR PUBLICATION
The opinion in support of the decision being entered today (1) was not written
for publication in a law journal and (2) is not binding precedent of the Board.
Paper No. 25
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte TINGHAO WANG, UAHA RAGHURAM
and JAMES E. NULTY
____________
Appeal No. 2003-2001
Application No. 09/345,173
____________
ON BRIEF
____________
Before GARRIS, PAK and KRATZ, Administrative Patent Judges.
KRATZ, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal from the examiner's final
rejection of claims 1-16 and 19-22, which are all of the claims
pending in this application.
BACKGROUND
Appellants' invention relates to a polysilicon layer etching
method. An understanding of the invention can be derived from a
reading of exemplary claim 1, which is reproduced below.
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