The opinion in support of the decision being entered today
was not written for publication and is not binding precedent
of the Board.
Paper No. 33
UNITED STATES PATENT AND TRADEMARK OFFICE
__________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
__________
Ex parte RUICHEN LIU, HELEN L. MAYNARD,
and CHEIN-SHING PAI
__________
Appeal No. 2004-0721
Application No. 09/401,409
__________
ON BRIEF
__________
Before GARRIS, KRATZ, and PAWLIKOWSKI, Administrative Patent
Judges.
GARRIS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on an appeal from the final rejection of
claims 1-6 and 13-25 which are all of the claims remaining in the
application.
The subject matter on appeal relates to a process for making
a multi-layer interconnect which comprises depositing a low-k
1
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