The opinion in support of the decision being entered today was not written for
publication and is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
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BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
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Ex parte DINESH CHOPRA
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Appeal No. 2005-0123
Application No. 10/114,759
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HEARD: April 6, 2005
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Before HAIRSTON, GROSS, and BARRY, Administrative Patent Judges.
GROSS, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal from the examiner's final
rejection of claims 1 through 10, which are all of the claims
pending in this application.
Appellant's invention relates to forming contacts in an
integrated circuit. The disclosed method includes forming on a
semiconductor layer a barrier layer having a sublayer of metal
nitride and a substantially pure metal layer and electroplating
on the pure metal layer a conductive layer. Claim 1 is
illustrative of the claimed invention, and it reads as follows:
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