The opinion in support of the decision being entered
today was not written for publication in a law journal
and is not binding precedent of the Board.
Paper No. 29
UNITED STATES PATENT AND TRADEMARK OFFICE
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
Ex parte MAHJOUB ALI ABDELGADIR and ALVARO MAURY
Appeal No. 2005-0339
Application No. 09/376,039
ON BRIEF
Before KIMLIN, PAK and TIMM, Administrative Patent Judges.
KIMLIN, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal from the final rejection of claims 1, 2,
4-19 and 21-28, all the claims remaining in the present
application. Claim 1 is illustrative:
1. A method of making an integrated circuit comprising:
forming a conductive layer, having conductive lines with
gaps therebetween, adjacent a semiconductor substrate, including
forming at least some of the conductive lines with different
widths;
depositing a fluoro-silicate glass (FSG) layer including
forming peaks having larger heights for larger widths of the
conductive lines, by high-density plasma chemical vapor
-1-
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