The opinion in support of the decision being entered today was not written for
publication and is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte ROGER PATRICK and PHILLIP L. JONES
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Appeal No. 2005-0537
Application No. 08/925,985
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ON BRIEF
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Before KRATZ, JEFFREY T. SMITH, and PAWLIKOWSKI, Administrative
Patent Judges.
KRATZ, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal from the examiner's final
rejection of claims 1, 2, 4-10 and 25-33, which are all of the
claims pending in this application.
BACKGROUND
Appellants' invention relates to a method of etching a
substrate in a plasma processing chamber using a sacrificial
substrate holder for allegedly obtaining improved etch
uniformity. A further understanding of the invention may be
obtained by a reading of appealed claim 1, which is reproduced
below.
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