The opinion in support of the decision being entered today was not
written for publication and is not binding precedent of the Board
UNITED STATES PATENT AND TRADEMARK OFFICE
_______________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
_______________
Ex parte TOSHIAKI OHMORI
______________
Appeal 2005-2100
Application 09/826,038
Technology Center 1700
_______________
Decided: September 15, 2006
_______________
Before ADAMS, JEFFREY T. SMITH, and FRANKLIN, Administrative Patent
Judges.
FRANKLIN, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on an appeal under 35 U.S.C. § 134 from the examiner’s final
rejection of claim 6. Claim 6 is reproduced below:
6. A method of manufacturing a semiconductor device including a plurality of
processing processes, the method comprising the steps of:
dry etching a predetermined film to be processed;
wet etching, after said step of dry etching, the predetermined film to be
processed;
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