The opinion in support of the decision being entered today was not written
for publication and isnot binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte MICHAEL J. BERMAN and JAN FURE
____________
Appeal No. 2006-0629
Application No. 10/668,021
____________
ON BRIEF
____________
Before GROSS, LEVY, and NAPPI, Administrative Patent Judges.
LEVY, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal from the examiner's final
rejection of claims 1-9, 19 and 20, which are all of the claims
pending in this application.
We REVERSE.
BACKGROUND
The appellants' invention relates to improving the
uniformity and other process characteristics of chemical
mechanical polishing of integrated circuits (specification,
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