Appeal No. 2006-0629 Παγε 2
Application No. 10/668,021
page 2). A sheet of pressure sensitive material is placed
between the conditioner and the polishing pad, and the polishing
pad is lowered onto the sheet of pressure sensitive material. A
desired degree of pressure is applied between the conditioner and
the polishing pad, thereby creating an impression in the sheet of
pressure sensitive material. The sheet of pressure sensitive
material is inspected to determine the uniformity of the
pressure applied between the conditioner and the polishing pad
(specification, page 5).
Claim 1 is representative of the invention, and is
reproduced as follows:
1. A method for inspecting a uniformity of pressure applied
between a conditioner and a polishing pad on a chemical
mechanical polisher, the method comprising the steps of:
placing a sheet of measure sensitive material between the
conditioner and the polishing pad,
lowering the conditioner onto the sheet of pressure sensitive
material,
applying a desired degree of pressure between the conditioner
and the polishing pad, thereby creating an impression in
the sheet of pressure sensitive material,
lifting the conditioner from the sheet of pressure sensitive
material, and inspecting the sheet of pressure sensitive
material to determine the uniformity of the pressure applied
between the conditioner and the polishing pad.
The prior art references of record relied upon by the
examiner in rejecting the appealed claims are:
Lin 6,477,447 Nov. 5, 2002
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