THIS OPINION WAS NOT WRITTEN FOR PUBLICATION
The opinion in support of the decision entered today (1) was not written for
publication in a law journal and (2) is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
__________________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
__________________
Ex parte EDWARD W. CONRAD
and DAVID P. PAUL
Appeal No. 2006-0741
Reexamination Control No. 90/006,185
Patent No. 5,963,3291
HEARD April 5, 2006
Before MARTIN, LEE and MOORE, Administrative Patent Judges.
LEE, Administrative Patent Judge.
DECISION ON APPEAL
This is a decision on appeal under 35 U.S.C. § 134 and § 306 from the
examiner’s rejection of the patentee’s claims 1-14 and 16-28 in the patent
reexamination proceeding.
References relied on by the Examiner
Raymond et al. (Raymond) “Metrology of subwavelength photoresist gratings using
optical scatterometry,” Journal of Vacuum Science &
Technology, B, Vol. 13, No. 4, July/August 1995, pp. 1484-
1495
1 Issued October 5, 1999, and based on application 08/961,929, filed October 31, 1997.
Request for reexamination received January 10, 2002. The real party in interest is Nanometrics Incorporated.
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