The opinion in support of the decision being entered today was not written
for publication and is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte ROLAND BRUNNER, HELMUT SCHWENK,
and JOHANN ZACH
____________
Appeal No. 2006-1078
Application No. 09/425,694
____________
ON BRIEF
____________
Before WALTZ, FRANKLIN, and GAUDETTE, Administrative Patent Judges.
GAUDETTE, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal under 35 U.S.C. § 134 from the Final Rejection mailed
September 17, 2005. Claims 1-9 and 11-15 are pending. All of the pending claims
have been finally rejected and are appealed.
Claims 1 and 12 are illustrative of the subject matter on appeal and are
reproduced below:
1. A process for the wet chemical treatment of semiconductor
wafers with treatment liquids in baths, consisting of the steps of
firstly treating the semiconductor wafers in a bath with an aqueous
HF solution containing HF and optionally HCI and optionally a surfactant;
then treating the semiconductor wafers in a bath with an aqueous
O3 solution containing O3 and optionally HF; and
then treating the semiconductor wafers in a bath with an aqueous
HCI solution containing HCI and optionally O3;
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