The opinion in support of the decision being entered today was not
written for publication and is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte STEPHEN C. SCHULTZ, JOHN D. HERB and
NIKOLAY KOROVIN
____________
Appeal No. 2006-1527
Application No. 10/302,223
Technology Center 3700
____________
ON BRIEF
____________
Before OWENS, LEVY and NAPPI, Administrative Patent Judges.
OWENS, Administrative Patent Judge.
DECISION ON APPEAL
This appeal is from a rejection of claims 16-24 and 26-33,
which are all of the pending claims.
THE INVENTION
The appellants claim a wafer polishing apparatus. Claim 16
is illustrative:
An apparatus for polishing a wafer comprising:
a solid polishing platen;
a support base coupled to the solid polishing platen
and configured to move the solid polishing platen in an
orbital motion during a polishing operation;
a polishing pad affixed to the solid polishing platen;
and
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