Appeal No. 2006-1527
Application No. 10/302,223
a front reference wafer carrier comprising:
a rotationally mounted carrier body having an
upper and a lower surface;
a flexible membrane comprising a first surface for
pressing the wafer against the polishing pad while the solid
polishing platen moves in an orbital motion and a second
surface facing the lower surface of the carrier body and
defining a pressurizable cavity between the carrier body and
the second surface.
THE REFERENCES
Breivogel et al. (Breivogel) 5,554,064 Sep. 10, 1996
Hoshizaki et al. (Hoshizaki) 5,908,530 Jun. 1, 1999
Takahashi 6,135,858 Oct. 24, 2000
(filed Jul. 1, 1998)
Inaba 6,139,409 Oct. 31, 2000
(filed Jun. 1, 1999)
THE REJECTIONS
The claims stand rejected under 35 U.S.C. § 103 as follows:
claims 16-22, 24, 26, 27 and 29-33 over Breivogel in view of
Takahashi; claim 23 over Breivogel in view of Takahashi and
Inaba; and claim 28 over Breivogel in view of Takahashi and
Hoshizaki.
OPINION
We affirm the aforementioned rejections.
In the rejection over Breivogel in view of Takahashi the
appellants do not address any particular claim and, even though
an additional reference is applied to each of dependent claims 23
and 28, the appellants do not provide a substantive argument as
2
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