The opinion in support of the decision being entered today was not
written for publication and is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
__________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
__________
Ex parte RANA P. SINGH
and PAUL A. INGERSOLL
__________
Appeal No. 2006-2050
Application No. 10/045,913
__________
ON BRIEF
__________
Before RUGGIERO, BARRY, and MACDONALD, Administrative Patent Judges.
RUGGIERO, Administrative Patent Judge
DECISION ON APPEAL
This is a decision on the appeal from the rejection of claims 1-10, 15-34, and 38-
42, which are all of the claims pending in this application. Claims 11-14 and 35-37 have
been canceled.
The claimed invention relates to a method for forming a semiconductor device
structure in which first and second trenches having first and second widths are formed in
a semiconductor layer. After first and second insulator liners are grown in the first and
second trenches, a mask is formed over the second trench and at least a portion of the first
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