The opinion in support of the decision being entered today was not written
for publication and is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
_______________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
_______________
Ex parte CHI-WEN LIU
and YING-LANG WANG
______________
Appeal 2006-2759
Application 10/043,860
Technology Center 1700
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Decided: September 28, 2006
_______________
Before GARRIS, PAK, and WARREN, Administrative Patent Judges.
WARREN, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal under 35 U.S.C. § 134 from the decision of the
Examiner finally rejecting claims 1, 3, 4, 6, 9 through 13, 15 through 19 and
21 and refusing to allow claim 5 as amended subsequent to the final
rejection, which are all of the claims in the application.
Claim 1 illustrates Appellants’ invention of a method for pre-etching a
semiconductor wafer, and is representative of the claims on appeal:
1
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