Appeal 2007-0108
Application 10/698,884
S.A. Trushin et al., Femtosecond Dynamics and Vibrational Coherence in
Gas-Phase Ultraviolet Photodecomposition of Cr(CO)6,102 Journal Phys.
Chem. A 4129-37 (1998)
Appellants’ claimed invention is directed to a method of depositing an
element on a substrate by irradiating a donor compound that is suspended in
a carrier gas with optical radiation. The optical radiation has sufficient
intensity to cause deposition of one or more of the elements of the
compound onto the substrate through photochemical decomposition of its
molecules. Claim 23 on appeal requires that the optical radiation has a pulse
width that is insufficient to cause thermal absorption of the deposited
element that would thermally induce breakdown of the donor compound.
Appealed claims 1-6, 8-14, and 20-22 stand rejected under 35 U.S.C.
§ 103(a) as being unpatentable over Polanyi, taken alone, or in view of
Morishige. Claims 23, 24, and 25 stand rejected under 35 U.S.C. § 103(a) as
being unpatentable over the stated combination of references further in view
of Trushin.
We have thoroughly reviewed the respective positions advanced by
Appellants and the Examiner. In so doing, we agree with Appellants that the
Examiner has not established a prima facie case of obviousness for the
claimed subject matter. Accordingly, we will not sustain the Examiner’s
rejections.
We consider first the Examiner’s rejection of claims 1-6, 8-14, and
20-22 over Polanyi, taken alone, or in view of Morishige. We do not
subscribe to the Examiner’s position that “for the claims as written, while
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