Appeal 2006-1512
Application 10/131,455
I. BACKGROUND
The invention relates to a clamp rings for securing substrates to a
support member within a deposition chamber. The clamp ring has an edge
exclusion lip with a variable bottom surface to a support member within a
deposition chamber (Specification 1). Claim 1 is illustrative of the subject
matter on appeal:
1. A clamp ring for securing a substrate comprising:
a body;
one or more substrate contacting surfaces projecting from the
body; and an edge exclusion lip projecting from the body, the lip sized
and adapted to project over an edge of any substrate beneath the one
or more contacting surfaces, the lip spaced from the substrate at an
innermost edge of the lip by a first distance and spaced from the
substrate at the substrate edge by a second distance smaller than the
first distance, the lip that having a first bottom surface extending
outwardly from the innermost edge of the lip and a second bottom
surface projecting inward from the body over the substrate edge,
wherein at least the second distance permits deposition of a
layer of pre-selected material to a predefined thickness on each of a
predetermined number of substrates secured by the clamp ring without
bridging between the substrate and the clamp ring, and
wherein the first bottom surface is sloped from the first distance
to the second distance and the second bottom surface is substantially
parallel to the substrate.
The Examiner relies on the following prior art references to show
unpatentability:
Takashi JP 09143716 A Jun. 3, 1997
Stevens US 5,810,931 Sep. 22, 1998
Lee US 6,162,336 Dec. 19, 2000
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