Appeal 2006-2571
Application 09/759,179
We affirm the decision of the Primary Examiner with respect to
claims 6 and 11 through 14, and reverse the decision with respect to all other
claims.
Claims 1, 6, and 7 illustrate Appellant’s invention of a stamp and a
method of manufacturing the same, and are representative of the claims on
appeal:
1. A stamp for use in a lithographic process, which stamp comprises a
stamp body with a printing face, said stamp body having a first recess with
an [sic] first aperture in the printing face, wherein
the first recess becomes narrower as its distance to the printing face
increases, and
cross-sections of the first recess parallel to the printing face, when
projected perpendicularly on the printing face, lie within the first aperture,
and a third recess with an [sic] third aperture in the printing face and a depth
perpendicular to the printing face that is greater than the depth of the first
recess is present in the stamp body,
which third recess has cross-sections parallel to the printing face and
becomes substantially narrower as its distance to the printing face increases,
said cross-sections, when projected perpendicularly on the printing face,
lying within the third aperture,
the aperture of the third recess and the aperture of the first recess each
have a dimension in a first direction in the printing face, and
said dimension of the aperture of the third recess is at least five times
the dimension of said aperture of the first recess, wherein at least one of the
first and third recesses has a triangular shape in a plane perpendicular to the
printing face;
wherein the stamp body has a Young modulus greater than 106 N/m2,
and the stamp body further has an elastic layer disposed therein.
6. A method of manufacturing a stamp for use in a lithographic
process, which stamp has a stamp body with a surface which coincides
partly with the printing face, comprising the steps of:
2
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Last modified: September 9, 2013