Appeal 2007-0378 Application 10/212,895 record to rebut this position. The Examiner’s rejection of claim 16 is therefore sustained. Regarding claims 3-5 and 12-14, Appellants argue that the claimed pressure and temperature ranges are critical to achieve the unexpected result of forming an upper electrode in contact with the paraelectric layer (Br. 15). The Examiner argues that (1) the pressure and temperature ranges in Kim are within the claimed ranges, and (2) the claimed ranges involve routine optimization within the level of ordinary skill in the art (Answer 12). We will sustain the Examiner’s rejection of claims 3-5 and 12-14. As the Examiner indicates, Kim teaches depositing the PZT layer via CVD methods with a chamber pressure of 0.1-10 Torr – a range that completely encompasses the claimed pressure range (Kim, col. 7, ll. 30-37). Moreover, Kim discloses a deposition temperature of 450-800°C – a temperature range that overlaps the claimed temperature range (Id.). A prima facie case of obviousness arises when claimed ranges overlap the ranges disclosed in the prior art. In re Harris, 409 F.3d 1339, 1341, 74 USPQ2d 1951, 1953 (Fed. Cir. 2005). “Where the claimed ranges are completely encompassed by the prior art, the conclusion that the claims are prima facie obvious is even more compelling than in cases of mere overlap. Even without complete overlap of the claimed range and the prior art range, a minor difference shows a prima facie case of obviousness.” Id. (internal quotation marks and citations omitted); see also MPEP § 2144.05. Although Appellants contend that both the pressure and temperature ranges are critical to achieve the unexpected result of forming an upper electrode in contact with the paraelectric layer, Appellants have simply not rebutted the Examiner’s prima facie case of obviousness on this record. 9Page: Previous 1 2 3 4 5 6 7 8 9 10 11 Next
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