The opinion in support of the decision being entered today was not written
for publication and is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte LINDSEY H. HALL
____________
Appeal 2007-0411
Application 10/320,122
Technology Center 1700
____________
Decided: January 23, 2007
____________
Before EDWARD C. KIMLIN, BRADLEY R. GARRIS, and CHARLES F.
WARREN, Administrative Patent Judges.
KIMLIN, Administrative Patent Judge.
DECISION ON APPEAL
This is an appeal from the final rejection of claims 1-8. Claim 1 is
illustrative:
1. A method for cleaning high-density capacitors on a semiconductor
wafer comprising:
cleaning inorganic material from said high-density capacitors on said
semiconductor wafer with sulfuric acid.
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