The opinion in support of the decision being entered today was not written
for publication and is not binding precedent of the Board.
UNITED STATES PATENT AND TRADEMARK OFFICE
____________
BEFORE THE BOARD OF PATENT APPEALS
AND INTERFERENCES
____________
Ex parte MICHAEL BELYANSKY,
OLEG GLUSHENKOV AND
ANDREAS KNORR
____________
Appeal 2007-0653
Application 10/338,254
Technology Center 1700
____________
Decided: February 9, 2007
____________
Before EDWARD C. KIMLIN, BRADLEY R. GARRIS, and
LINDA M. GAUDETTE, Administrative Patent Judges.
KIMLIN, Administrative Patent Judge.
ORDER REMANDING TO THE EXAMINER
This is an appeal from the final rejection of claims 1, 3-19, 21, and 22.
Claims 1 and 11 are illustrative:
1. A method of oxidizing a substrate using a plasma, the substrate
having a surface area of at least 3,000mm2 capable of being converted to an
oxide, comprising:
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