Ex Parte Belyansky et al - Page 1



                 The opinion in support of the decision being entered today was not written                
                         for publication and is not binding precedent of the Board.                        

                       UNITED STATES PATENT AND TRADEMARK OFFICE                                           
                                              ____________                                                 
                             BEFORE THE BOARD OF PATENT APPEALS                                            
                                        AND INTERFERENCES                                                  
                                              ____________                                                 
                                   Ex parte MICHAEL BELYANSKY,                                             
                                      OLEG GLUSHENKOV AND                                                  
                                           ANDREAS KNORR                                                   
                                              ____________                                                 
                                            Appeal 2007-0653                                               
                                         Application 10/338,254                                            
                                         Technology Center 1700                                            
                                              ____________                                                 
                                        Decided: February 9, 2007                                          
                                              ____________                                                 

               Before EDWARD C. KIMLIN, BRADLEY R. GARRIS, and                                             
               LINDA M. GAUDETTE, Administrative Patent Judges.                                            
               KIMLIN, Administrative Patent Judge.                                                        


                              ORDER REMANDING TO THE EXAMINER                                              
                      This is an appeal from the final rejection of claims 1, 3-19, 21, and 22.            
               Claims 1 and 11 are illustrative:                                                           
                      1.  A method of oxidizing a substrate using a plasma, the substrate                  
               having a surface area of at least 3,000mm2 capable of being converted to an                 
               oxide, comprising:                                                                          




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