Appeal 2007-1570
Application 10/646,720
THE INVENTION
The disclosed invention relates generally to an apparatus and method
for detecting very small distances, and, more particularly, to proximity
sensing with gas flow (Specification 1).
Independent claims 19, 39, and 46 are illustrative:
19. A method, comprising:
using first and second probes each having a respective
elongated nozzle;
scanning the first probe over a reference surface to produce
successive reference values, such that a size of an opening of the
elongated nozzle allows for an entire area of the reference surface
adjacent the first probe during the scanning to be measured by
substantially eliminating low sensitivity areas;
scanning the second probe over a measured surface to produce
successive measured values, such that a size of an opening of the
elongated nozzle allows for an entire area of the measured surface
adjacent the second probe during the scanning to be measured by
substantially eliminating low sensitivity areas; and
determining a topography of the measured surface based on a
difference between respective ones of the successive measured values
and respective ones of the successive reference values.
39. A system, comprising:
means for directing a gas stream into a reference channel and a
measurement channel;
means for evenly restricting gas flow through the reference
channel and the measurement channel;
2
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