Appeal 2007-1851
Application 10/020,461
forming a high-density plasma in the process chamber from the
silicon source gas and the oxygen source gas;
forming a plurality of separated silicate glass optical cores over
an undercladding layer disposed within the process chamber with the high-
density plasma, the separated silicate glass optical cores defining a sequence
of gaps; and
depositing an uppercladding layer over the plurality of
separated silicate glass optical cores,
wherein each of the silicate glass optical cores is formed with a
refractive index greater than a refractive index of the undercladding layer
such that each of the optical cores has a contrast relative to the
undercladding layer greater than 2%.
The Examiner relies upon the following references as evidence of
obviousness:
Dragone US 5,136,671 Aug. 4, 1992
Kyoto US 5,221,309 Jun. 22, 1993
Bazylenko US 6,154,582 Nov. 28, 2000
Johnson US 6,614,977 B2 Sep. 2, 2003
Applicants’ admission located at the bottom of page 3 of the paper of
Aug. 23, 2004
Appellants’ claimed invention is directed to a method of forming an
optical waveguide comprising a plurality of separated silicate glass optical
cores over an undercladding layer. The process involves forming a high-
density plasma from silicon and oxygen source gases in a process chamber,
and using the plasma to form the optical cores. The refractive index of the
silicate glass optical cores has a contrast relative to the refractive index of
the undercladding layer of greater than 2%.
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