Appeal 2007-1851 Application 10/020,461 claims” (Br. 15, last para.). While Appellants focus upon the plasma enhanced chemical vapor deposition process described at column 7, lines 13-22 of Johnson, Johnson teaches that a number of chemical vapor deposition processes may be employed, such as Appellants’ high density plasma chemical vapor deposition process (see col. 4, ll. 25 et seq.). As a final point, we note that Appellants base no argument upon objective evidence of nonobviousness, such as unexpected results, which would serve to rebut the inference of obviousness established by the applied prior art. In conclusion, based on the foregoing and the reasons well stated by the Examiner, the Examiner’s decision rejecting the appealed claims is affirmed. No time period for taking any subsequent action in connection with this appeal may be extended under 37 C.F.R. § 1.136(a)(1)(iv) (2006). AFFIRMED clj Townsend and Townsend and Crew LLP/AMAT Two Embarcadero Center Eighth Floor San Francisco, CA 94111-3834 8Page: Previous 1 2 3 4 5 6 7 8
Last modified: September 9, 2013