Ex Parte M et al - Page 8



                Appeal 2007-1851                                                                             
                Application 10/020,461                                                                       

                claims” (Br. 15, last para.).  While Appellants focus upon the plasma                        
                enhanced chemical vapor deposition process described at column 7,                            
                lines 13-22 of Johnson, Johnson teaches that a number of chemical vapor                      
                deposition processes may be employed, such as Appellants’ high density                       
                plasma chemical vapor deposition process (see col. 4, ll. 25 et seq.).                       
                As a final point, we note that Appellants base no argument upon                              
                objective evidence of nonobviousness, such as unexpected results, which                      
                would serve to rebut the inference of obviousness established by the applied                 
                prior art.                                                                                   
                      In conclusion, based on the foregoing and the reasons well stated by                   
                the Examiner, the Examiner’s decision rejecting the appealed claims is                       
                affirmed.                                                                                    
                      No time period for taking any subsequent action in connection with                     
                this appeal may be extended under 37 C.F.R. § 1.136(a)(1)(iv) (2006).                        
                                                AFFIRMED                                                     





                clj                                                                                          
                Townsend and Townsend and Crew LLP/AMAT                                                      
                Two Embarcadero Center                                                                       
                Eighth Floor                                                                                 
                San Francisco, CA  94111-3834                                                                

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