Appeal 2007-1869
Application 09/023,416
1 interconnect said valves and said fluid controllers in selected fluid flow
2 relation.
3
4 THE REFERENCE
5 Itafuji (JP ‘720) (as translated) JP 7-286720-A Oct. 31, 1995
6
7
8 THE REJECTION
9 Claim 1 stands rejected under 35 U.S.C. § 102(b) as anticipated by JP ‘720.
10 OPINION
11 We affirm the aforementioned rejection.
12 JP ‘720 discloses a semiconductor fabrication machine gas transfer unit
13 having input block 10 attached, via attachment block 24, to the input control port
14 of flow control valve/mass flowmeter 53 (JP ‘720, ¶¶ 0001, 0011; fig. 3). Input
15 shutoff valve 54 and purge valve 55 are attached to the upperside of input
16 block 10 (JP ‘720, ¶ 0011, fig. 3). Output block 11 is attached, via attachment
17 block 25, to the output control port of flow control valve/mass flowmeter 53.
18 See id. Output shutoff valve 56 is attached to the upperside of output block 11.1
19 See id. Communication path 20 in input block 10 links input block 10 to the input
20 of input shutoff valve 54, communication path 19 in input block 10 and attachment
21 block 24 links the outputs of input shutoff valve 54 and purge valve 55 to flow
22 control valve/mass flowmeter 53, communication path 18 in attachment block 25
23 and output block 11 links the output of flow control valve/mass flowmeter 53 to
24 output shutoff valve 56, and communication path 16 links the output of output
1 The JP ‘720 upperside attachments correspond to the Appellants’ joint members
(compare the Appellants’ fig. 4 and JP ‘720’s fig. 3).
3
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Last modified: September 9, 2013