Appeal 2007-2197
Application 10/254,119
immediately in front of a surface being coated such that the kinetic energy of
the ions deflects approaching particles away from the surface being coated
(claim 1).
Claim 1 is illustrative:
1. A method for actively protecting a substrate from particulate
contamination while a thin film is being applied to the substrate, comprising
directing a beam of ions through the space immediately in front of a surface
being coated, wherein the kinetic energy of said ions is used to deflect an
approaching particle away from said substrate, preventing it from reaching
the surface being coated.
The Examiner relies on the following prior art references as evidence
of unpatentability:
Matsumaru US 5,431,794 Jul. 11, 1995
Nakamura US 6,057,233 May 2, 2000
The rejections as presented by the Examiner are as follows:
1. Claims 1, 4, and 5 are rejected under 35 USC § 102(b) as being
unpatentable over Nakamura.
2. Claims 2 and 3 are rejected under 35 USC § 103(a) as being
unpatentable over Nakamura.
3. Claim 6 is rejected under 35 USC § 103(a) as being unpatentable over
Nakamura in view of Matsumaru.
Appellants argue claim 1 only. Accordingly, claims 2-6, which
depend from claim 1, stand or fall with claim 1.
OPINION
35 USC § 102(b) NAKAMURA
Appellants argue Nakamura “teach[es] away” from using an ion beam
for deflection of particles (Br. 4). Appellants further argue that Nakamura
2
Page: Previous 1 2 3 4 5 Next
Last modified: September 9, 2013