Appeal 2007-3372 Application 10/651,351 The analysis supporting obviousness should be made explicit and should “identify a reason that would have prompted a person of ordinary skill in the art to combine the elements” in the manner claimed. KSR Int’l Co. v. Teleflex, Inc., 127 S. Ct. 1727, 1731, 82 USPQ2d 1385, 1389 (2007). § 103(a) Rejection over Takahashi taken with Yasuzato. Appellant argues claims 1, 2, 4, 9 and 10 together as a group. We select claim 1 as the representative claim for this claim grouping. The Examiner has determined that Takahashi discloses much of the representative claim 1 method step requirements but that “[t]he difference between the claims and Takahashi is that Takahashi does not disclose that the projected pattern image is focused at approximately mid-depth of the photoresist on the substrate” (Answer 4 and 5). The Examiner further relies on Yasuzato as evidence of the obviousness of the subject matter of representative claim 1. The Examiner contends that it would have been obvious to one of ordinary skill in the art at the time of the invention “to modify Takahashi by employing the method of focusing the light to ... mid-depth of the photoresist as suggested by Yasuzato because Yasuzato, in col. 5, lines 46-54, and in col. 6, lines 1-13, discloses that increasing the depth of focus enables the precision of the pattern dimension to be enhanced” (Answer 5). Appellant does not dispute that Takahashi taught or would have suggested the representative claim 1 method but for the focus location (approximately mid-depth of the photoresist) of the step of focusing the altered image pattern as required by appealed claim 1 (Br. 5-9; Reply Br. 2- 4Page: Previous 1 2 3 4 5 6 7 8 9 10 11 12 Next
Last modified: September 9, 2013