Appeal 2007-3372
Application 10/651,351
was a known result effective variable like the other two result effective
variables used in the equation. Rather, Appellant contends that the focal
distance (amount of defocus, or focal depth) into the substrate (s) is not
recognized as a result effective variable by Takahashi (Br. 10-16; Reply Br.
4-8). We are not persuaded of reversible error in the Examiner’s
obviousness determination based on this line of argument, as furnished in
the Briefs.
At the outset, we note that the question raised by this line of argument
as presented in the Briefs may be more properly asked as follows. Has
Appellant established reversible error in the Examiner’s obviousness
rejection of representative claim 11 (as well as separately considered claim
3) by the contention that the applied references, including Takahashi, would
not have taught, suggested or otherwise led one of ordinary skill in the art to
the determination or recognition that the focal distance into the substrate is a
result effective variable (in addition to the other two claimed factors) for
optimizing the amount of correction to be applied to the mask pattern image
of Takahashi that is to be projected into a photoresist. We answer this
question in the negative on this record.
Here, the thrust of Appellant’s argument is that:
The Final Action argues that Takahashi recognizes a
relationship between the line width change relative to the
degree of defocus, which allegedly satisfies the requirement
that the focal distance is recognized by Takahashi as a result-
effective variable. This is not the case. In particular, the graph
in Figure 2 of Takahashi represents "a relationship between a
line width of the resist image and the focus position provided as
a result of projecting the reticle 6 pattern onto the wafer 8 with
a certain spherical aberration." See, Takahashi at col. 3, lines
44-47 (emphasis added). The focus position has no effect on
the line width; rather, the spherical aberration applied to the
9
Page: Previous 1 2 3 4 5 6 7 8 9 10 11 12 Next
Last modified: September 9, 2013