Appeal No. 95-2413
Application 07/936,865
OPINION
Grouping of claims
Appellants divide the claims into five groups (Br3):
Group 1 - claims 36-38, 45, and 47;
Group 2 - claims 13-18, 22, 29, 30, 33-35, 42-44, and 60;
Group 3 - claims 31, 32, 46, 48-57, and 61;
Group 4 - claims 39-41;
Group 5 - claims 58, 59, and 62 .2
Obviousness
Scope and content of the prior art
Sato '375
Sato '375 describes a planar magnetron sputtering source
in which a number of permanent magnets are arranged into a
heart shape represented by the following formula:
r = l - a + 2a*2*/B (-B # 2 # B)
where the geometry and terms are defined in figure 3(1) and
page 5 of the translation. This arrangement is said to
provide uniform erosion but non-uniform film thickness
(figure 3(3); translation, page 5). The formula for r is
recognized as a portion of spiral having a polar equation
r = b2. The first point on the curve is the smallest radius,
Claim 62 depends from claim 13 and will be treated to2
stand or fall with claim 13 in Group 2.
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