Appeal No. 95-2413
Application 07/936,865
l-a, which can occur at any arbitrary angle 2 (which can be
0
considered the zero angle in a new coordinate system):
r = b2 = l-a, at 2 = 2 . The greatest radius, l+a, occurs at0 0
2 = 2 +B: r = b(2 +B) = b2 +bB = l-a + bB = l+a, at 2 = 2 +B.0 0 0 0
So b = 2a/B. Therefore, r = l-a + 2a*2*/B, for -B # 2 # B.
The centers of the magnets gaps are aligned along the curve
and, so, the width of the closed-loop path appears to be
constant.
Sato '374
Sato '374 discloses the same heart-shaped curve based on
a spiral as Sato '375, which is said to provide equal target
sputtering (translation, page 7). Sato '374 provides no
additional information to Sato '375.
Suzuki
Suzuki is the U.S. equivalent of European Patent
Publication No. 211,412, published February 25, 1987, noted at
page 2, lines 17-20, of the specification (Information
Disclosure Statement, Paper No. 5). Suzuki discloses a planar
magnetron sputtering source in which the magnets are arranged
"to make an erosion of the target surface uniform and also to
deposit the sputtering material uniformly on a substrate"
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