Appeal No. 95-2413
Application 07/936,865
target, Elmgren in figure 1 also shows that the target 29 is
concave, and Japanese patent '462 [Sawada] in figures 2-3 also
shows that the target 1 is either concave or convex."
Appellants argue that the references are only pertinent to the
claims in Group 2 (RBr3, 5). We agree with this assessment
and note that it would have made for a clearer rejection if
the examiner had not lumped all claims into one group. We
look at each reference separately.
Wegmann
Wegmann, figure 2, discloses a sputtering device having
target cathode parts 26, 27 to produce a cup-like structure.
We examine only the elements associated with cathode 27. The
front surface of target cathode 27 appears to be shown after
some erosion has taken place and is presumed to have a
"smoothly continuous concave" front surface before sputtering.
A magnetic system 32 in eccentric position is provided to be
rotated beneath the target cathode 27.
Claim 34 calls for a "smoothly continuous concave closed
front surface." The target 27 of Wegmann, figure 2, is
presumed to show the front surface after some erosion has
taken place, and is presumed to have a "smoothly continuous
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