Appeal No. 95-2413
Application 07/936,865
concave" front surface before sputtering. The magnet
arrangement 32 in Wegmann is not shown. However, any of Sato
'375, Sato '374, or Suzuki teaches how to provide a
closed-loop magnetic path. It is noted that no special
erosion profile is claimed and, thus, even a circular path
would meet claim 34. The rejection of claim 34 is sustained.
Appellants do not separately argue "convex" versus "concave."
Therefore, the rejection of claim 35 is sustained.
Claim 29 additionally recites that the shape of segments
forming a closed loop of the magnet means is "substantially
conforming to a mathematical equation selected to produce a
desired erosion pattern over a substantial portion of said
target surface." Each of Sato '375, Sato '374, and Suzuki
teaches providing a closed-loop magnetic path "conforming to a
mathematical equation" for a planar target. One of ordinary
skill in the art would have had sufficient knowledge and skill
to apply the planar target teachings to the non-planar target
of Wegmann by providing a spiral path having "a very narrow
width" extending radially and axially. Every point on the
target swept by this spiral would be exposed uniformly to
produce a uniform "desired pattern." In addition, as a matter
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