Appeal No. 95-2413
Application 07/936,865
using a concave target as taught by Elmgren with a moving
magnet magnetron sputtering device comes from appellants'
disclosure. Accordingly, the rejection of claims 13-18, 22,
29, 30, 33-35, 42-44, and 60 over either Suzuki or Sato '374
or Sato '375 in view of Elmgren is reversed.
Group 3 - claims 31, 32, 46, 48-57, and 61
The Group 3 claims are all directed to rotating magnets
that include a plurality of individual magnets that are
positioned between spaced apart "keepers" or pole pieces.
Claims 46 and 48 recite "closed-loop magnetic pole pieces" and
claim 61 recites "bending two flexible pole pieces into
calculated closed-loop shapes." Claim 31 recites "spaced-
apart keepers for holding said magnet array in position, said
keepers substantially conforming to the shape of said
centerline and offset therefrom," which implicitly requires
that the keepers be in a "closed-loop" to perform the function
of holding the magnet array in position.
The examiner states that "Suzuki in column 1, line [sic]
45-50 shows that the inner and outer magnets are kept and held
by magnetic yoke 3, it is therefore considered that while the
magnets keeper are not shown for the purpose of simplicity,
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